Abstract: Aiming at the selection of maintenance strategy for equipment reliability, This article first proposed a evaluation index system for equipment maintenance reliability from three perspectives: equipment operation guarantee, equipment maintenance, and equipment daily management and gives the modeling steps and flow chart of the grey correlation decision model, Delphi method and analytic hierarchy process are used to combine qualitative and quantitative analysis methods to determine and optimize the weight of qualitative indicators. Then, combined with the actual data of coating equipment operation and maintenance in a semiconductor panel manufacturing industry, a grey correlation decision optimization model is constructed to calculate the effect vector, the ideal optimal effect vector and the grey comprehensive correlation degree of the decision scheme of each index. Finally, through the grey correlation analysis, the optimal strategy selection of Coating equipment maintenance reliability is realized. The research in this paper has practical guiding significance for coating equipment maintenance decision-making, improving coating equipment maintenance reliability and reducing equipment maintenance cost. 

Key words:  , Equipment maintenance reliability, Equipment maintenance strategy, Grey relational decision